Frequently Asked Questions

How small a defect can you see?

The minimum detectable size depends on the type of defect. Under optimum conditions and with proper illumination, particles as small as 0.1 to 0.35 microns have been observed with video enhancement. 0.5 to 1 micron minimum detectable size is more typical for the human eye through scientific quality microscope objectives. Scratches and most other defects can usually be seen in the 0.5 to 1 micron range.

Why should I consider a PSI Photomask Inspection Station?

The PSI Stations are ideal OFF-LINE inspection review tools at affordable prices for performing rapid, detailed reviews of mask and pellicle defects and for making reticle repair/replacement decisions.

Do you have any applications information on these products?

Yes, we have an application note showing the differences between bright-field and dark-field illumination very clearly (pun intended). If you would like us to send a copy, click here and give us your mailing and e-mail address. Be sure to tell us if you prefer e- or regular mail.

What’s the difference between the models?

The 300 Series Stations are used in inspecting and reviewing mask reticles up to 7”. 400 Series Stations are used for reticles up to 9” (for 300 mm wafers). The 500 Series Stations are for LCD panels up to 20”. The differences between the three models within each series are in the defect locating (X-Y co-ordinate) system, in the data handling, and in stage automation.

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