small a defect can you see?
detectable size depends on the type of defect. Under optimum
conditions and with proper illumination, particles as small as 0.1
to 0.35 microns have been observed with video enhancement. 0.5 to
1 micron minimum detectable size is more typical for the human eye
through scientific quality microscope objectives. Scratches and
most other defects can usually be seen in the 0.5 to 1 micron
should I consider a PSI Photomask Inspection Station?
Stations are ideal OFF-LINE inspection review tools at affordable
prices for performing rapid, detailed reviews of mask and pellicle
defects and for making reticle repair/replacement decisions.
you have any applications information on these products?
Yes, we have an
application note showing the differences between bright-field and
dark-field illumination very clearly (pun intended). If you would
like us to send a copy, click here and give us your mailing and
e-mail address. Be sure to tell us if you prefer e- or regular
the difference between the models?
300 Series Stations are used in inspecting and reviewing mask
reticles up to 7”. 400 Series Stations are used for reticles up
to 9” (for 300 mm wafers). The 500 Series Stations are for LCD
panels up to 20”. The differences between the three models
within each series are in the defect locating (X-Y co-ordinate)
system, in the data handling, and in stage automation.